In-situ Mems Inertial Sensor Health Prognostic Method Based On Micro Vibrator (基于微振动台的MEMS惯性传感器原位健康状态监测方法)


Abstract: This talk explores the ability of the micro vibrator providing both high-g vibration and high angular rate rotation. The equations analyzed indicate that higher vibration frequency and driven voltage, thinner PZT and silicon film and reduced equivalent mass of the moving platform can increase the peak acceleration. A simple experiment using commercial MEMS accelerometer AD22281 mounted on a z-axis vibrator is designed to demonstrate the feasibility of prognostic both high-g and angular rate characteristics of generic MEMS inertial sensors with micro vibrator. Finally, a general prognostic scheme for generic MEMS inertial sensors’ health status is developed. Speaker's Bio: Dr. Gang Dai is an associate research fellow of Microsystem & Terahertz Research Center, China Academy of Engineering Physics, where he focuses on R&D of integrated microsystems, power electronics and advanced MEMS sensors. He received the B.S. degree and Ph.D. degree in physics from Tsinghua University, Beijing, China, in 2006 and 2011, respectively. His work is published in over 20 peer reviewed journal and refereed conference papers.

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